Tohoku University Technology: Reflective Projection Optical Device: T08-062
Compared to conventional technology, the light output improves by about four times and the magnification improves by about twenty times.
The present invention relates to a projection optical device utilizing mirrors, specifically a reflective type projection optical device suitable for various microscopes and the like. In a typical reflective projection optical device, a Schwarzschild optical system composed of a pair of concave and convex mirrors is used to reduce aberrations associated with imaging. However, conventional devices of this type have a problem where the magnification of the imaging optical system is insufficient for high-resolution observation. For example, the focal lengths that can be easily achieved with a Schwarzschild optical system are limited by the outer diameter of the mirrors that can be produced, which is around 10 mm, and the maximum imaging magnification that can be realized with an overall length of about 1 m is approximately 100 times. Therefore, to achieve a spatial resolution of 10 nm on a sample, a two-dimensional detector requires a resolution of less than 1 μm, but the minimum pixel size of back-illuminated CCDs widely used in this wavelength range is about 10 μm, leading to a challenge where the detector's resolution is lacking by about one order of magnitude. The present invention relates to a reflective type projection optical device composed entirely of mirrors, which can significantly improve imaging magnification and light quantity compared to conventional devices by utilizing the method shown in Figure 1.
- Company：Tohoku Techno Arch Co., Ltd.
- Price：Other
